@phdthesis{ubrig:pastel-00003495, TITLE = {{Encapsulation de dispositifs sensibles {\`a} l'atmosph{\`e}re par des d{\'e}p{\^o}ts couches minces {\'e}labor{\'e}s par PECVD.}}, AUTHOR = {Ubrig, Jennifer}, URL = {https://pastel.hal.science/pastel-00003495}, SCHOOL = {{Ecole Polytechnique X}}, YEAR = {2007}, MONTH = Nov, KEYWORDS = {Encapsulation ; Multilayer ; Interface ; Permeation ; plasma enhanced chemical vapor deposition (PECVD) ; silicon oxides (SiOx) ; Multicouche ; d{\'e}p{\^o}t chimique en phase vapeur (PECVD) ; oxydes de silicium (SiOx)}, TYPE = {Theses}, PDF = {https://pastel.hal.science/pastel-00003495/file/Ubrig.pdf}, HAL_ID = {pastel-00003495}, HAL_VERSION = {v1}, }