@phdthesis{kroely:pastel-00550241, TITLE = {{Process and material challenges in the high rate deposition of microcrystalline silicon thin films and solar cells by Matrix Distributed Electron Cyclotron Resonance plasma}}, AUTHOR = {Kroely, Laurent}, URL = {https://pastel.hal.science/pastel-00550241}, SCHOOL = {{Ecole Polytechnique X}}, YEAR = {2010}, MONTH = Sep, KEYWORDS = {thin film solar cells ; microcrystalline silicon ; microwave plasma ; high rate depositions}, TYPE = {Theses}, PDF = {https://pastel.hal.science/pastel-00550241/file/PhD_thesis_Laurent_KROELY_final_version.pdf}, HAL_ID = {pastel-00550241}, HAL_VERSION = {v1}, }