@phdthesis{orlach:tel-01643702, TITLE = {{Modeling of a silane-hydrogen plasma discharge including nanoparticle dynamics for photovoltaic applications.}}, AUTHOR = {Orlac'H, Jean-Maxime}, URL = {https://pastel.hal.science/tel-01643702}, NUMBER = {2017SACLX023}, SCHOOL = {{Universit{\'e} Paris Saclay (COmUE)}}, YEAR = {2017}, MONTH = May, KEYWORDS = {Plasma ; Modeling ; Nanoparticles ; Silane ; Silicon ; Epitaxy ; Plasma ; Mod{\'e}lisation ; Nanoparticules ; Silane ; Silicium ; {\'E}pitaxie}, TYPE = {Theses}, PDF = {https://pastel.hal.science/tel-01643702/file/58302_ORLACH_2017_archivage.pdf}, HAL_ID = {tel-01643702}, HAL_VERSION = {v1}, }