@phdthesis{harada:tel-03956359, TITLE = {{{\'E}laboration de couches minces d'oxydes dop{\'e}es terres rares par CVD pour les technologies quantiques}}, AUTHOR = {Harada, Nao}, URL = {https://pastel.hal.science/tel-03956359}, NUMBER = {2021UPSLC029}, SCHOOL = {{Universit{\'e} Paris sciences et lettres}}, YEAR = {2021}, MONTH = Oct, KEYWORDS = {Rare Earth oxides ; Physics chemitry of materials ; Surface ; CVD liquid injection ; Optical characterization ; Thin film ; Oxydes de terres rares ; CVD injection liquide ; Caract{\'e}risation optique ; Couches minces ; Surface ; Physico-Chimie des mat{\'e}riaux}, TYPE = {Theses}, PDF = {https://pastel.hal.science/tel-03956359/file/2021UPSLC029_archivage.pdf}, HAL_ID = {tel-03956359}, HAL_VERSION = {v1}, }