Nanostructuring High-k dielectrics Raman scattering Neodymium Oxygen vacancies Silicon nanoclusters Rare earth Pulvérisation cathodique Semiconductors Feature erasure Nanostructured materials Refractive index Cathodoluminescence Si-rich silicon oxide GENOMIQUE IR spectroscopy Rare earths Erbium Photoluminescence Waveguides Hafnium silicates Laser pyrolysis Radiofrequency magnetron sputtering Rare-earth ions Terres rares Sputtering Liposomes Guide d'onde Silicium Optical amplifiers Copper Energy transfer Fluorescence Electron paramagnetic resonance Microstructure Nanoparticules Photovoltaic HR STEM-HAADF Al2O3 CO adsorption MoS2 Lifetime Films Grazing incidence X-ray diffraction Terbium Thin films Luminescence FTIR Magnetron sputtering AFM Nanoparticles Couches minces Si nanocluster Epitaxy Rare-earth Friction Phase transition Microstructure physique Optical properties Cerium M-lines Raman Multilayers Atom probe tomography Nanostructures Oxide materials Crystal structure Silicon photonics Hillocks Couches minces semi-conductrices Conductivity SiC Hafnium silicate PZT ADE-FDTD Quantum-well CoMoS Computational electromagnetic methods Pulvérisation magnétron radiofréquence XRD Silicon nitride Down-conversion Electroluminescence Oxide interface Silicon nanocrystals Nanostructure Thin film Oxides Infrared absorption Silicon Doping Structural properties Reactive magnetron sputtering Irradiation Hybrid materials Waveguide Matériaux hybrides RF magnetron sputtering Microstructure physics Citric acid